Plasma processing member, deposition apparatus including the same, and depositing method using the same

ABSTRACT

A deposition apparatus according to an exemplary embodiment of the present invention includes a plurality of reaction spaces, a plurality of plasma electrodes respectively disposed in the reaction spaces, a first plasma processor connected to at least two plasma electrodes, and a first plasma power source connected to the first plasma processor. The first plasma processor may include a plasma distributor or a plasma splitter.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a Continuation Application of U.S. patentapplication Ser. No. 12/577,885 filed on Oct. 13, 2009, which claimspriority to Korean Patent Application No. 10-2008-0100300 filed in theKorean Intellectual Property Office on Oct. 13, 2009, the entirecontents of which are incorporated herein by reference.

BACKGROUND OF THE INVENTION

(a) Field of the Invention

The present invention relates to a plasma processor, a depositionapparatus including the same, and a deposition method.

(b) Description of the Related Art

A process technology with which a conductive or non-conductive thin filmis uniformly and correctly deposited has become important assemiconductor integration technology has been developed.

Thin film deposition methods may be classified into chemical vapordeposition (CVD), physical vapor deposition (PVD), and atomic layerdeposition (ALD), and these deposition methods use plasma.

Meanwhile, to increase thin film deposition speed, the requirement for amulti-wafer processing system simultaneously processing severalsubstrates is increased. In this multi-wafer atomic layer depositionsystem, when using a spatial division, it is important to generateuniform plasma by using a simple device in each reaction space in aplasma enhancement deposition method.

To generate the uniform plasma, plasma power supplied to each reactionspace must be uniform. To generate the uniform plasma in each reactionspace, each reaction space may be connected to a different plasma powersource and may be applied with the same plasma power, however theequipment is complicated and the cost is increased in this case.

The above information disclosed in this Background section is only forenhancement of understanding of the background of the invention andtherefore it may contain information that does not form the prior artthat is already known in this country to a person of ordinary skill inthe art.

SUMMARY OF THE INVENTION

The present invention provides a plasma processor and a depositionapparatus including the same, and a deposition method for easilyproviding uniform plasma to each reaction space in a depositionapparatus using a multi-wafer processing system.

A deposition apparatus according to an exemplary embodiment of thepresent invention includes a plurality of reaction spaces, a pluralityof plasma electrodes respectively disposed in the reaction spaces, afirst plasma processor connected to at least two plasma electrodes, anda first plasma power source connected to the first plasma processor.

The first plasma processor may include a plasma distributor. The plasmadistributor may include a plurality of distributing circuits. The outputterminals of the distributing circuits may be respectively connected tothe plasma electrodes. The first plasma processor may further include asensor connected between the output terminals of the distributingcircuits and the plasma electrodes. The first plasma processor mayfurther include a plasma distributor driving circuit connected to thesensor and controlling the operation of the plasma distributor. Thefirst plasma processor may include a plasma splitter. The plasmasplitter may include a plurality of switches for switching to connectthe input terminals connected to the first plasma power source to theoutput terminals. The output terminals of the switches may berespectively connected to the plasma electrodes. The first plasmaprocessor may further include a plasma splitter driving circuitcontrolling the operation of the switches. The first plasma processormay include a plasma splitter and a plasma distributor connected to theplasma splitter. The plasma splitter may include a plurality of switchesfor switching to connect the input terminals connected to the firstplasma power source to the output terminals, and the output terminals ofthe switches may be respectively connected to the plasma distributor.The plasma distributor may include a plurality of plasma distributingcircuits, and the output terminals of the plasma distributing circuitsmay be respectively connected to the plasma electrodes. The first plasmaprocessor may further include a driving circuit controlling theoperation of the plasma splitter. The deposition apparatus may furtherinclude a plurality of matching members connected between the firstplasma processor and the plasma electrodes.

The deposition apparatus may further include a second plasma processorconnected to at least two remaining plasma electrodes excluding the atleast two among the plasma electrodes, and a second plasma power sourceconnected to the second plasma processor.

The second plasma processor may include a plasma distributor. The plasmadistributor may include a plurality of distributing circuits. The outputterminals of the distributing circuits may be respectively connected tothe plasma electrodes. The second plasma processor may further include asensor connected between the output terminals of the distributingcircuits and the plasma electrodes. The second plasma processor mayfurther include a plasma distributor driving circuit connected to thesensor and controlling the operation of the plasma distributor. Thesecond plasma processor may include a plasma splitter. The plasmadistributor may include a plurality of distributing circuits. The outputterminals of the distributing circuits may be respectively connected tothe plasma electrodes. The second plasma processor may further include asensor connected between the output terminals of the distributingcircuits and the plasma electrodes. The second plasma processor mayfurther include a plasma distributor driving circuit connected to thesensor and controlling the operation of the plasma distributor. Thesecond plasma processor may include a plasma splitter. The plasmasplitter may include a plurality of switches for switching to connectthe input terminals connected to the second plasma power source to theoutput terminals. The output terminals of the switches may berespectively connected to the plasma electrodes. The second plasmaprocessor may further include a driving circuit controlling theoperation of the plasma splitter.

A plasma processor according to an exemplary embodiment of the presentinvention includes a plurality of plasma distributing circuits connectedto one plasma power source, a plurality of plasma electrodes connectedto the output terminals of the plasma distributing circuits, and adriving circuit controlling the plasma distributing circuits.

A plurality of sensors connected between the output terminals of theplasma distributing circuits and the plasma electrodes may furtherincluded, and the sensors are connected to the driving circuits.

A plasma processor according to another exemplary embodiment of thepresent invention includes an input terminal connected to one plasmapower source, a switch connected to the input terminal and switching toconnect the input terminal to a plurality of output terminals, aplurality of plasma electrodes respectively connected to the outputterminals, and a driving circuit controlling the operation of theswitch.

A plasma processor according to another exemplary embodiment of thepresent invention includes an input terminal connected to one plasmapower source, a switch connected to the input terminal and switching toconnect the input terminal to a plurality of output terminals, aplurality of plasma distributing circuits respectively connected to theoutput terminals, and a plurality of plasma electrodes respectivelyconnected to the output terminals of the plasma distributing circuits.

The plasma processor may further include a plurality of sensorsrespectively connected between the output terminals of the plasmadistributing circuits and the plasma electrodes, and a driving circuitconnected to the sensors and controlling the plasma distributingcircuits.

According to an exemplary embodiment of the present invention, in adeposition apparatus using a multi-wafer processing system, the plasmamay be easily and simply generated in each reaction space through simpleconfigurations.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of a multi-wafer deposition apparatusaccording to an exemplary embodiment of the present invention.

FIG. 2 is a layout view of the multi-wafer deposition apparatus shown inFIG. 1 according to an exemplary embodiment of the present invention.

FIG. 3 is a schematic view of a plasma processor in a multi-waferdeposition apparatus according to an exemplary embodiment of the presentinvention.

FIG. 4A and FIG. 4B are waveform diagrams illustrating an operation of amulti-wafer deposition apparatus according to an exemplary embodiment ofthe present invention.

FIG. 5 is a layout view of a multi-wafer deposition apparatus accordingto the second exemplary embodiment of the present invention.

FIG. 6 is a schematic view of a plasma processor in a multi-waferdeposition apparatus according to the second exemplary embodiment of thepresent invention.

FIG. 7A and FIG. 7B are waveform diagrams illustrating an operation of amulti-wafer deposition apparatus according to the second exemplaryembodiment of the present invention.

FIG. 8 is a layout view of a multi-wafer deposition apparatus accordingto third exemplary embodiment of the present invention.

FIG. 9 is a schematic view of a plasma processor in a multi-waferdeposition apparatus according to third exemplary embodiment of thepresent invention.

FIG. 10 is a waveform diagram illustrating an operation of a multi-waferdeposition apparatus according to third exemplary embodiment of thepresent invention.

FIG. 11 is a layout view of a multi-wafer deposition apparatus accordingto forth exemplary embodiment of the present invention.

FIG. 12 is a schematic view of a plasma processor in a multi-waferdeposition apparatus according to forth exemplary embodiment of thepresent invention.

FIG. 13 is a waveform diagram illustrating an operation of a multi-waferdeposition apparatus according to forth exemplary embodiment of thepresent invention.

FIG. 14 is a layout view of a multi-wafer deposition apparatus accordingto fifth exemplary embodiment of the present invention.

FIG. 15 is a schematic view of a plasma processor in a multi-waferdeposition apparatus according to fifth exemplary embodiment of thepresent invention.

FIG. 16 is a waveform diagram illustrating an operation of a multi-waferdeposition apparatus according to fifth exemplary embodiment of thepresent invention.

FIG. 17 is a schematic view of a multi-wafer deposition apparatusaccording to another exemplary embodiment of the present invention.

FIG. 18 is a schematic view of a multi-wafer deposition apparatusaccording to another exemplary embodiment of the present invention.

DETAILED DESCRIPTION OF THE EMBODIMENTS

The advantages, characteristics, and means for achieving them of thepresent invention will become apparent from reference to the exemplaryembodiments in the following detailed description accompanying thedrawings. However, the present invention is not limited by thehereafter-disclosed exemplary embodiments, and may be modified invarious different ways. The present exemplary embodiments providecomplete disclosure of the present invention and complete information ofthe scope of the present invention to those skilled in the art, and thepresent invention is defined by the scope of the claims.

The present invention will be described more fully hereinafter withreference to the accompanying drawings, in which exemplary embodimentsof the invention are shown. As those skilled in the art would realize,the described embodiments may be modified in various different ways, allwithout departing from the spirit or scope of the present invention.

In the drawings, the thickness of layers, films, panels, regions, etc.,are exaggerated for clarity. Like reference numerals designate likeelements throughout the specification. When it is said that any part,such as a layer, film, area, or plate is positioned “on” another part,it means the part is directly on the other part or above the other partwith at least one intermediate part. In contrast, when an element isreferred to as being “directly on” another element, there are nointervening elements present.

Firstly, a multi-wafer deposition apparatus 100 according to anexemplary embodiment of the present invention will be described withreference to FIG. 1 and FIG. 2.

FIG. 1 is a schematic diagram of a multi-wafer deposition apparatusaccording to an exemplary embodiment of the present invention, and FIG.2 is a layout view of the multi-wafer deposition apparatus shown in FIG.1 according to an exemplary embodiment of the present invention.

A deposition apparatus shown in FIG. 1 and FIG. 2 as a portion of alarge system or a reactor is a portion of a loading system such as aload platform, a load-back chamber, and robots, or a portion of thereactor including a gas supply system and a control systems such as amemory, a processor, and a user interface, that are programmed tosequentially execute a method according to an exemplary embodiment ofthe present invention. Also, the position of the constituent elements isrelative with reference to other portions, and is not absolute.

Referring to FIG. 1 and FIG. 2, the multi-wafer deposition apparatus 100includes a lower portion 115 and an upper portion (or a cover) 130. Thelower portion 115 includes a lower body 120 and an upper body 121. Adeposition apparatus 100 according to the present exemplary embodimentincludes first to fourth reaction spaces 170, 180, 190, and 200. Asubstrate supporting platform 110 transfers a substrate or wafers W1 toW4 between the reaction spaces. In the present exemplary embodiment, thereaction spaces 170, 180, 190, and 200 are partioned by a purge walldefined by a vertical plate 163, and a space between purge walls has achannel 161 receiving a purge gas from a pipe (not shown) of the coverand outputting the purge gas into a region 125 under the reaction spacethrough a hole 162. The region 125 is defined by a substrate supportingplatform 110, and the cover 130 or the upper body 121. The reactionspaces 170, 180, 190, and 200 are defined by a plurality of wallsincluding the cover 130, the vertical plate 163, the substrate, and thesubstrate supporting platform 110.

Each lower portion of the reaction spaces may be defined by a horizontalwall having an empty space for mounting the surface of the substrate. Inthe present exemplary embodiment, the reaction space 170 is disposedadjacent to the reaction space 180, the reaction space 180 is disposedadjacent to the reaction space 190, the reaction space 190 is disposedadjacent to the reaction space 200, and the reaction space 200 isdisposed adjacent to the reaction space 170. The cover 130 covers theupper portion of the openings of the reaction spaces 170, 180, 190, and200, and the channel 161 for providing an airtight connection. Thereaction spaces receives the gas from inlets 172, 182, 192, and 202 ofthe cover 130, and outputs the gas through outlets 173, 183, and 193formed on the side wall of the reaction spaces, and vertical exhaustpassages 175, 185, and 195. In FIG. 1, three outlets and verticalexhaust passages are shown among four reaction spaces. The reactionspaces include a gas dispersion member (not shown) for dispersing thegas inflowed from the inlets 172, 182, 192, and 202 at the whole surfaceof the substrate, and the gas dispersion member may be a shape known toa person of ordinary skill in the art such as a showerhead or trumpetshape.

Referring to FIG. 1, the lower portion 115 of the atomic layerdeposition apparatus 100 includes the lower body 120 and the upper body121. The upper body 121 is disposed to insert the cover 130, and thecover 130 is disposed on the vertical plate 163.

The gas is inflowed through the inlets 172, 182 and 192 of the cover130. The gas is exhausted from the reaction spaces 170, 180, and 190through the outlets 173, 183, and 193 formed on the side surface of thereaction space and then the gas is exhausted into the vertical exhaustpassages 175, 185, and 195 disposed at the lower body 120. It ispreferable that the outlets of the reaction spaces are respectivelypartioned. Accordingly, the mixture of the gas state of the reactionmaterial that may generate unnecessary particles is prevented, and themixture of the gas state is generated sufficiently away from thereaction space such that contamination of the reaction space can bereduced. The exhaust passage may be connected to a pumping system. Whena common pumping system to reduce cost is used for preventing thegeneration of the particles at the inlet of the reaction space, theoutlets are preferrabley connected each other at a portion far away fromeach reaction region. In FIG. 1, an arrow means a general gas flowingdirection in the atomic layer deposition apparatus 100.

The wafers W1, W2, W3 and W4 have an upper surface at least partiallyexposed to the respective reaction spaces 170, 180, 190, and 200.Referring to FIG. 2, the upper surface of the wafer W1 is exposed to thereaction space 170, the upper surface of the wafer W2 is exposed to thereaction space 180, the upper surface of the wafer W3 is exposed to thereaction space 190, and the upper surface of the wafer W4 is exposed tothe reaction space 200. In another exemplary embodiment, the substratesupporting platform 110 is disposed adjacent to the walls defining thereaction spaces such that the empty spaces of the reaction spaces may beeffectively closed and sealed. When the reaction spaces are notsubstantially closed and sealed, and a space exists between thesubstrate supporting platform 120 and the upper body 121, the purge gasflows under the channel 161 to the region 125 under the reaction spaces170, 180, 190, and 200 such that the reaction spaces are preferablyisolated.

In the present exemplary embodiment, the substrate supporting platform110 may include a rotation shaft (not shown). The substrate supportingplatform 110 may be continuously or sequentially rotated. In anotherexemplary embodiment, the substrate supporting platform 110 may berotated back-and-forth. The reaction materials inflow and meet eachother at the space between the substrate supporting platform 110 and thelower body 120 such that the space is purged by the purge gas to preventthe contamination within the space. The purge gas continuously flowsupward toward the reaction space through a space 126 between the lowerbody 120 and the substrate supporting platform 110. The purge gas isexhausted through the outlets 173, 183, and 193.

In another exemplary embodiment according to the present invention, thesubstrate supporting platform may be vertically moved with respect tothe reaction space. This vertical movement separates the wafers from thereaction spaces, and exposes the empty space region under each reactionspace.

Referring to FIG. 2, a multi-wafer deposition apparatus 100 according toan exemplary embodiment of the present invention includes first tofourth plasma electrodes 501, 502, 503, and 504 respectively insertedinto the reaction spaces 170, 180, 190, and 200. The first to fourthplasma electrodes 501, 502, 503, and 504 are respectively applied with avoltage to generate plasma to the reaction spaces 170, 180, 190, and 200of the deposition apparatus 100. The first to fourth plasma electrodes501, 502, 503, and 504 are respectively connected with first to fourthmatching members 510, 520, 530, and 540, and the first matching member510 and the second matching member 520, and the third matching member530 and the fourth matching member 540, are connected in pairs to afirst plasma processor 610 and a second plasma processor 620,respectively. Also, the first plasma processor 610 and the second plasmaprocessor 620 are respectively connected to a first power source 710 anda second power source 720.

In the multi-wafer deposition apparatus 100 according to an exemplaryembodiment of the present invention, the first plasma processor 610connected to the first power source 710 receives power from the firstpower source 710 and applies the power with a predetermined magnitude ata predetermined time to the first matching member 510 and the secondmatching member 520 such that the first plasma electrode 501 and thesecond plasma electrode 502 are applied with the predetermined voltage.Also, the second plasma processor 620 connected to the second powersource 720 receives power from the second power source 720 and appliesthe power with a predetermined magnitude at a predetermined time to thethird matching member 530 and the forth matching member 540 such thatthe third plasma electrode 503 and the forth plasma electrode 504 areapplied with the predetermined voltage. Like this way, the multi-waferdeposition apparatus according to an exemplary embodiment of the presentinvention includes the plasma processors 610 and 620 such that theplasma electrodes disposed in the plurality of reaction spaces may beapplied with the plasma voltage with the predetermined magnitude at thepredetermined time without connection with a different power source.

Referring to FIG. 1 and FIG. 2, the gas may be directly inflowed intothe reaction spaces 170, 180, and 190 through gas pipes 171, 181, and191, respectively. Each gas pipes 171, 181, and 191 may be a cylindricalshaped tube, and may have an optional structure for transporting thegas. The gas pipes are preferably made of stainless steel.

The gas pipes 171, 181, and may be respectively disposed at the inlets172, 182, 192, and 202. In the multi-wafer deposition apparatus 100according to the present exemplary embodiment, the first inlet 172 andthe second inlet 182, and the third inlet 192 and the fourth inlet 202,are respectively connected to one of outer pipes 410 and 420 atintersecting points, and the intersecting points may include switches310 and 320. Through the switches 310 and 320, one of the first inlet172 and the second inlet 182 may be connected to the outer pipes 410,and one of the third inlet 192 and the fourth inlet 202 may be connectedto the outer pipes 420.

A plasma processor of a multi-wafer deposition apparatus and anoperation thereof according to an exemplary embodiment of the presentinvention will be described with reference to FIG. 3 and FIG. 4A andFIG. 4B. FIG. 3 is a schematic view of a plasma processor in amulti-wafer deposition apparatus according to an exemplary embodiment ofthe present invention, and FIG. 4A and FIG. 4B are waveform diagramsillustrating an operation of a multi-wafer deposition apparatusaccording to another exemplary embodiment of the present invention.

The plasma processors 610 and 620 of a multi-wafer deposition apparatusaccording to the present exemplary embodiment include a plasmadistributing unit 600 a. Referring to FIG. 3, the plasma distributingunit 600 a includes first and second distributors 641 a and 641 b,sensors 642 a and 642 b respectively connected to the distributors 641 aand 641 b, and a driving circuit 644 a connected to the sensors 642 aand 642 b for controlling the distributors 641 a and 641 b.

The distributors 641 a and 641 b respectively include a power sourcedistributing circuit for distributing input plasma power, for exampleradio frequency (RF) power, with the same magnitude such that inputplasma power is distributed and outputted with the same magnitude. Thesensors 642 a and 642 b connected to the distributors 641 a and 641 bmeasure the magnitude of the power outputted from the distributor 641 aand 641 b and determine whether the input plasma power is distributedwith the predetermined magnitude. The driving circuit 644 a that isconnected to the sensors 642 a and 642 b controls the distributors 641 aand 641 b depending on the magnitude of the plasma power outputted fromthe distributors 641 a and 641 b and the external signal (a distributorsignal interface) to distribute the input plasma power with thepredetermined magnitude.

An operation of the multi-wafer deposition apparatus including theplasma distributing unit 600 a shown in FIG. 3 will be described withreference to FIG. 4A and FIG. 4B.

The plasma distributing unit 600 a according to the present exemplaryembodiment may be one example of the first plasma processor 610 or thesecond plasma processor 620 of the multi-wafer deposition apparatusshown in FIG. 2, such that the first distributor 641 a and the seconddistributor 641 b may be respectively connected to the portion of thefirst to fourth plasma electrodes 501, 502, 503, and 504 connected tothe plurality of reaction spaces. For example, the first distributor 641a may be connected to the first plasma electrode 501 disposed in thefirst reaction space 170 and the second distributor 641 b may beconnected to the second plasma electrode 502 disposed in the secondreaction space 180, or the first distributor 641 a may be connected tothe third plasma electrode 503 disposed in the third reaction space 190and the second distributor 641 b may be connected to the fourth plasmaelectrode 504 disposed in the fourth reaction space 200. In FIG. 4A andFIG. 4B, on/off operation of the power input to the first plasmaprocessor 610 and the second plasma processor 620 are respectivelydenoted by RFG1 and RFG2, on/off operation of the voltage applied to thefirst to fourth plasma electrodes 501, 502, 503, and 504 arerespectively denoted by RC1, RC2, RC3, and RC4, and a period forsupplying the reaction gas to the reaction spaces 170 and 180, in whichthe first and second plasma electrodes 501 and 502 are inserted, and aperiod for supplying the reaction gas to the reaction spaces 190 and200, in which the third and fourth plasma electrodes 503 and 504 areinserted, are respectively denoted by Gas 1 and Gas 2.

Referring to FIG. 4A, as shown by RFG1 and RFG2, the first plasmaprocessor 610 and the second plasma processor 620 including the firstdistributor 641 a and the second distributor 641 b may be alternatelyapplied with the power; as shown by RC1 and RC2, the power applied bythe first distributor 641 a and the second distributor 641 b isdistributed during the time period in which the power is applied to thefirst plasma processor 610 such that the voltage is applied to the firstplasma electrode 501 and the second plasma electrode 502 connected tothe first plasma processor 610; and as shown by RC3 and RC4, the powerapplied during the time period in which the power is applied to thesecond plasma processor 620 is distributed by the first distributor 641a and the second distributor 641 b such that the voltage is applied tothe third plasma electrode 503 and the fourth plasma electrode 504.

Also, as shown by Gas 1 and Gas 2, when the voltage is applied to thefirst plasma electrode 501 and the second plasma electrode 502, thereaction gas is supplied to the gas inlets 172 and 182 of the first andsecond reaction spaces 170 and 180 inserted with the first plasmaelectrode 501 and the second plasma electrode 502 to generate the plasmato the first and second reaction spaces 170 and 180, and the reactiongas is not supplied to the third and the fourth reaction spaces 190 and200. When the plasma generation process of the first and second reactionspaces 170 and 180 is finished, the voltage is applied to the thirdplasma electrode 503 and the fourth plasma electrode 504, and during thetime that the voltage is applied to the third plasma electrode 503 andthe fourth plasma electrode 504, the reaction gas is supplied to the gasinlets 192 and 202 of the third and fourth reaction spaces 190 and 200to generate the plasma to the third and fourth reaction spaces 190 and200 and the reaction gas is not supplied to the gas inlets 172 and 182of the first and second reaction spaces 170 and 180. This process isperiodically repeated.

Referring to FIG. 4B, as shown by RFG1 and RFG2, the power may besimultaneously applied to the first plasma processor 610 and the secondplasma processor 620, and as shown by RC1 to RC4, during the time thatthe first plasma processor 610 and the second plasma processor 620 areapplied with the power, the applied power is distributed by the firstdistributor 641 a and the second distributor 641 b such that the voltageis applied to the first to fourth plasma electrodes 501, 502, 503, and504.

Also, as shown by Gas 1 and Gas 2, when the voltage is applied to thefirst to fourth plasma electrodes 501, 502, 503, and 504, the reactiongas is supplied through the gas inlets 172, 182, 192, and 202 of thefirst to fourth reaction spaces 170, 180, 190, and 200 to generate theplasma to the first to fourth reaction spaces 170, 180, 190, and 200,and if the plasma generation period is finished, the voltage is blockedto the first to fourth plasma electrodes 501, 502, 503, and 504 and thereaction gas is not supplied to the gas inlets 172, 182, 192, and 202 ofthe first to fourth reaction spaces 170, 180, 190, and 200. This processis periodically repeated.

In this way, the plasma processor 600 a of the multi-wafer depositionapparatus according to an exemplary embodiment of the present inventionincludes the plurality of distributors 641 a and 641 b connected to thereaction spaces such that the plasma voltage is controlled for applyingto the predetermined reaction spaces during the predetermined timeperiod.

Next, a plasma processor and an operation thereof of a multi-waferdeposition apparatus according to the second exemplary embodiment of thepresent invention will be described with reference to FIG. 5, FIG. 6,and FIG. 7A and FIG. 7B. FIG. 5 is a layout view of a multi-waferdeposition apparatus according to another exemplary embodiment of thepresent invention, FIG. 6 is a schematic view of a plasma processor in amulti-wafer deposition apparatus according to another exemplaryembodiment of the present invention, FIG. 7A and FIG. 7B are waveformdiagrams illustrating an operation of a multi-wafer depositionapparatus.

Referring to FIG. 5, a multi-wafer deposition apparatus according to thepresent exemplary embodiment is similar to the multi-wafer depositionapparatus shown in FIG. 1 and FIG. 2. The multi-wafer depositionapparatus according to the present exemplary embodiment includes aplurality of reaction spaces 170, 180, 190, and 200, and first to fourthplasma electrodes 511, 512, 513, and 514 respectively inserted into thereaction spaces 170, 180, 190, and 200. The first to fourth plasmaelectrodes 511, 512, 513, and 514 are respectively connected with firstto fourth matching members 521, 522, 523, and 524, and the firstmatching member 521 and the second matching member 522, and the thirdmatching member 523 and the fourth matching member 524, are respectivelyconnected in pairs to a first plasma processor 611 and a second plasmaprocessor 621. Also, the first plasma processor 611 and the secondplasma processor 621 are respectively connected to a first power source711 and a second power source 721. Like the above-described exemplaryembodiment, in the multi-wafer deposition apparatus according to anexemplary embodiment of the present invention, the first plasmaprocessor 611 connected to the first power source 711 receives the powerfrom the first power source 711, and applies the power with apredetermined magnitude during a predetermined time to the firstmatching member 521 and the second matching member 522 such that thefirst plasma electrode 511 and the second plasma electrode 512 areapplied with the predetermined voltage. Also, the second plasmaprocessor 621 connected to the second power source 721 receives thepower from the second power source 721, and applies the power with apredetermined magnitude during the predetermined time to the thirdmatching member 523 and the fourth matching member 524 such that thethird plasma electrode 513 and the fourth plasma electrode 514 may beapplied with the predetermined voltage.

Also, the first inlet 172 and the fourth inlet 202, and the second inlet182 and the third inlet 192, of the multi-wafer deposition apparatusaccording to the present exemplary embodiment are respectively connectedto one of outer pipes 430 and 440 at intersecting points, and theintersecting points may include switches 330 and 340. Through theswitches 330 and 340, respectively, one of the first inlet 172 and thefourth inlet 202 may be connected to the outer pipe 430, and one of thethird inlet 192 and the second inlet 182 may be connected to the outerpipe 440.

The plasma processors 611 and 621 of the multi-wafer depositionapparatus according to the present exemplary embodiment respectivelyinclude a plasma splitter 600 b. Referring to FIG. 6, the plasmasplitter 600 b includes a switch 645 a for switching one powerapplication unit a and two power output units b and b′, and a drivingcircuit 644 b for controlling the operation of the splitter 600 b. Thedriving circuit 644 b is connected to each power output unit b and b′ tomeasure the plasma power that is output to the power output units b andb′ such that the driving circuit 644 b measures the operation of theswitch 645 a and confirms the correct switching, and controls theoperation of the splitter 600 b depending on an external signal (asplitter signal interface) such that the input plasma power is outputtedto the predetermined output units b and b′ with the predeterminedmagnitude.

An example of the operation of the plasma splitter 600 b shown in FIG. 6is described. When the driving circuit 644 b controls the switch 645 adepending on the external signal, the switch is in the on state, andthen, the power application unit a is connected to the output unit bsuch that the output unit b is applied with the plasma power. When theswitch is in the off state, the power application unit a is connected tothe output unit b′, and then, the output unit b′ is applied with theplasma power. In this way, the plasma processors 611 and 621 of themulti-wafer deposition apparatus according to the present exemplaryembodiment includes the plasma splitter 600 b such that the plasma powermay be applied to the predetermined output units b and b′ depending onthe external signal.

An operation of the multi-wafer deposition apparatus including theplasma splitter 600 b shown in FIG. 6 will be described with referenceto FIG. 7A and FIG. 7B.

The plasma splitter 600 b according to the present exemplary embodimentmay be one example of the first plasma processor 611 or the secondplasma processor 621 of the multi-wafer deposition apparatus shown inFIG. 5, such that the output units b and b′ may be respectivelyconnected to the portion of the matching members 521, 522, 523, and 524connected to the first to fourth plasma electrodes 511, 512, 513, and514 connected to the plurality of reaction spaces, 170, 180, 190 and200.

For example, when the plasma splitter 600 b is the first plasmaprocessor 611, the output units b and b′ may be respectively connectedto the first plasma electrode 511 disposed in the first reaction space170 and the second plasma electrode 512 disposed in the second reactionspace 180, or when the plasma splitter 600 b is the second plasmaprocessor 621, the output units b and b′ may be respectively connectedto the third plasma electrode 513 disposed in the third reaction space190 and the fourth plasma electrode 514 disposed in the fourth reactionspace 200.

In FIG. 7A and FIG. 7B, when the plasma splitter 600 b is the firstplasma processor 611, the on/off operation of the switch 645 a of theplasma splitter 600 b is denoted by SP#1, when the plasma splitter 600 bis the second plasma processor 621, it is denoted by SP#2. Also, theon/off operation of the voltages applied to the first to fourth plasmaelectrodes 511, 512, 513, and 514 are respectively denoted by RC1, RC2,RC3, and RC4. In FIG. 7B, the on/off operations of the plasma powersource 711 connected to the first plasma processor 611 and the plasmapower source 721 connected to the second plasma processor 621 arerespectively represented by RFG1 and RFG2.

Referring to FIG. 7A, as shown by SP#1 and SP#2, when the switch 645 aof the plasma splitter 600 b of the first plasma processor 611 and thesecond plasma processor 621 is in the on state, the power applicationunit a is connected to one output unit b of the two power output units band b′ such that the voltage is applied to the first plasma electrode511 and the third plasma electrode 513 through the first matching member521 and the third matching member 523 connected to the output unit b.Also, when the switch 645 a of the plasma splitter 600 b is in the offstate, the power application unit a is connected to the output unit b′of the two power output units b and b′ such that the voltage is appliedto the second plasma electrode 512 and the fourth plasma electrode 514through the second matching member 522 and the fourth matching member524 that are connected to the output unit b′.

Referring to FIG. 7B, if the plasma power source 711 connected to thefirst plasma processor 611 is in the on state, the switch 645 a of theplasma splitter 600 b of the first plasma processor 611 is in the onstate, the plasma power source 721 connected to the second plasmaprocessor 621 is in the off state, and the switch 645 a of the plasmasplitter 600 b of the second plasma processor 621 is in the off state,the power application unit a of the plasma splitter 600 b in the firstplasma processor 611 is connected to one output unit b of two poweroutput units b and b′, and the voltage is applied to the first plasmaelectrode 511 through the first matching member 521 connected to theoutput unit b.

Also, if the plasma power source 711 connected to the first plasmaprocessor 611 is in the on state, the switch 645 a of the plasmasplitter 600 b of the first plasma processor 611 is in the off state,the plasma power source 721 connected to the second plasma processor 621is in the off state, and the switch 645 a of the plasma splitter 600 bof the second plasma processor 621 is in the off state, the powerapplication unit a of the plasma splitter 600 b in the first plasmaprocessor 611 is connected to the output unit b′ of the two power outputunits b and b′, and the voltage is applied to the second plasmaelectrode 512 through the second matching member 521 connected to theoutput unit b′.

Also, if the plasma power source 711 connected to the first plasmaprocessor 611 is in the off state, the switch 645 a of the plasmasplitter 600 b of the first plasma processor 611 is in the off state,the plasma power source 721 connected to the second plasma processor 621is in the on state, and the switch 645 a of the plasma splitter 600 b ofthe second plasma processor 621 is in the on state, the powerapplication unit a of the plasma splitter 600 b in the second plasmaprocessor 621 is connected to one output unit b of the power outputunits b and b′, and the voltage is applied to the third plasma electrode513 through the third matching member 523 connected to the output unitb.

Further, if the plasma power source 711 connected to the first plasmaprocessor 611 is in the off state, the switch 645 a of the plasmasplitter 600 b of the first plasma processor 611 is in the off state,the plasma power source 721 connected to the second plasma processor 621is in the on state, and the switch 645 a of the plasma splitter 600 b ofthe second plasma processor 621 is in the off state, the powerapplication unit a of the plasma splitter 600 b in the second plasmaprocessor 621 is connected to the output unit b′ of the two power outputunits b and b′, and the voltage is applied to the fourth plasmaelectrode 514 through the fourth matching member 524 connected to theoutput unit b′.

In this way, the plasma processors 611 and 621 of the multi-waferdeposition apparatus according to the present exemplary embodimentcontrols the on/off operation of the plasma power sources 711 and 721connected to the plasma splitter 600 b, and the on/off operation of theswitch 645 a of the plasma splitter 600 b, such that the plasma voltagemay be sequentially applied to the respective reaction spaces 170, 180,190, and 200 during the predetermined time period.

A plasma processor and an operation thereof of a multi-wafer depositionapparatus according to the third exemplary embodiment of the presentinvention will be described with reference to FIG. 8, FIG. 9, and FIG.10. FIG. 8 is a layout view of a multi-wafer deposition apparatusaccording to third exemplary embodiment of the present invention, FIG. 9is a schematic view of a plasma processor in a multi-wafer depositionapparatus according to third exemplary embodiment of the presentinvention, and FIG. 10 is a waveform diagram illustrating an operationof a multi-wafer deposition apparatus according to third exemplaryembodiment of the present invention.

Referring to FIG. 8, the multi-wafer deposition apparatus according tothe present exemplary embodiment includes a plurality of reaction spaces170, 180, 190, and 200, and first to fourth plasma electrodes 531, 532,533, and 534 respectively inserted into the reaction spaces 170, 180,190, and 200. The first to fourth plasma electrodes 531, 532, 533, and534 are respectively connected with first to fourth matching members541, 542, 543, and 544, and the first to fourth matching members 541,542, 543, and 544 are all connected to a plasma processor 650. Also, theplasma processor 650 is connected to a plasma power source 750. In themulti-wafer deposition apparatus according to the present exemplaryembodiment, the plasma processor 650 connected to the plasma powersource 750 receives power from the plasma power source 750, and appliesit to the first to fourth matching members 541, 542, 543, and 544 withthe predetermined magnitude during the predetermined time such that thepredetermined voltage is applied to the first to fourth plasmaelectrodes 531, 532, 533, and 534.

Also, the first inlet 172 and the second inlet 182, and the third inlet192 and the fourth inlet 202, of the multi-wafer deposition apparatusaccording to the present exemplary embodiment are respectively connectedto one of external pipes 450 and 460 at intersecting points, and theintersecting points may include switches 350 and 360. Through theswitches 350 and 360, one of the first inlet 172 and the second inlet182 may be connected to the external pipe 450, and one of the thirdinlet 192 and the fourth inlet 202 may be connected to the external pipe460.

Referring to FIG. 9, the plasma processor 650 of the multi-waferdeposition apparatus according to the present exemplary embodimentincludes a splitter including a switch 645 b that switches by connectingone power application unit a and two power output units b and b′ to eachother, and a plasma splitter including a splitter driving circuit 644 bcontrolling the splitter. Further, the plasma processor 650 of themulti-wafer deposition apparatus according to the present exemplaryembodiment includes a plasma distributing unit including first andsecond distributors 651 a and 651 b and a first distributor drivingcircuit 646 a that are connected to the power output unit b, and thirdand fourth distributors 652 a and 652 b and a second distributor drivingcircuit 646 b that are connected to the power output unit b′.

The plasma processor 650 of the multi-wafer deposition apparatusaccording to the present exemplary embodiment includes first and secondsensors 661 a and 661 b that are connected to the first and seconddistributors 651 a and 651 b and third and fourth sensors 662 a and 662b that are connected to the third and fourth distributors 652 a and 652b, and a control board 655 driving the splitter driving circuit 644 b,the first distributor driving circuit 646 a, and the second distributordriving circuit 646 b.

The splitter driving circuit 644 b of the plasma processor 650 of themulti-wafer deposition apparatus according to the present exemplaryembodiment is connected to power output units b and b′ thereby measuringthe plasma power output of the power output units b and b′, such thatcorrect switching is confirmed by measuring the operation of the switch645 b, and it is operated for the input plasma power to be output to therespective output units b and b′ with a predetermined magnitude bycontrolling the operation of the switch 645 b depending on an externalsignal.

Also, the first distributor driving circuit 646 a and the seconddistributor driving circuit 646 b measure the magnitude of the poweroutput from the distributors 651 a, 651 b, 652 a, and 652 b by using thefirst and second sensors 661 a and 661 b connected to the first andsecond distributors 651 a and 651 b, and the third and fourth sensors662 a and 662 b connected to the third and fourth distributors 652 a and652 b, to determine whether the input plasma power is distributed withthe predetermined magnitude, and control the magnitude of the poweroutput from the distributors 651 a, 651 b, 652 a, and 652 b, and thedistributors 651 a, 651 b, 652 a, and 652 b depending on the externalsignal to distribute the input plasma power with the predeterminedmagnitude.

The distributors 651 a, 651 b, 652 a, and 652 b are respectivelyconnected to the first to fourth matching members 541, 542, 543, and 544respectively connected to the first to fourth plasma electrodes 531,532, 533, and 534 shown in FIG. 8. Accordingly, the power applied fromthe plasma power source 750 according to the operation of the plasmasplitter and the plasma distributing unit of the plasma processor 650 isapplied to the first to fourth matching members 541, 542, 543, and 544with the predetermined magnitude during the predetermined time, suchthat the desired voltage is applied to the first to fourth plasmaelectrodes 531, 532, 533, and 534.

The operation of the plasma processor 650 of the multi-wafer depositionapparatus according to the present exemplary embodiment will bedescribed with reference to FIG. 9 and FIG. 10. In FIG. 10, the on/offoperation of the plasma splitter is represented as SP, and the on/offoperation of the voltage applied to the first to fourth plasmaelectrodes 531, 532, 533, and 534 are respectively represented as RC1,RC2, RC3, and RC4.

Referring to FIG. 10, if the switch 645 b of the plasma splitter is inthe on state, the power application unit a connected to the plasma powersource 750 is connected to the output unit b of the two power outputunits b and b′, and the power output to the output unit b is distributedby the first and second distributors 651 a and 651 b connected to thepower output unit b such that the first and second plasma electrodes 531and 532 are applied with the plasma voltage. Also, if the switch 645 bof the plasma splitter is in the off state, the power application unit aconnected to the plasma power source 750 is connected to the output unitb′ of the two power output units b and b′, and the power output to theoutput unit b′ is distributed by the third and fourth distributors 652 aand 652 b connected to the power output unit b′ such that the third andfourth plasma electrodes 533 and 534 are applied with the plasmavoltage.

In this way, the plasma processor 650 of the multi-wafer depositionapparatus according to the present exemplary embodiment includes theplasma splitter and the plasma distributing unit such that the plasmavoltage may be applied to the predetermined reaction space during thepredetermined time period by controlling the above-described operation.

A plasma processor and an operation thereof of a multi-wafer depositionapparatus according to the fourth exemplary embodiment of the presentinvention will be described with reference to FIG. 11 to FIG. 13. FIG.11 is a layout view of a multi-wafer deposition apparatus according toforth exemplary embodiment of the present invention, FIG. 12 is aschematic view of a plasma processor in a multi-wafer depositionapparatus according to forth exemplary embodiment of the presentinvention, and FIG. 13 is a waveform diagram illustrating an operationof a multi-wafer deposition apparatus according to forth exemplaryembodiment of the present invention.

Referring to FIG. 11, the multi-wafer deposition apparatus according tothe present exemplary embodiment includes a plurality of reaction spaces170, 180, 190, and 200, and first to fourth plasma electrodes 551, 552,553, and 554 respectively inserted into the reaction spaces 170, 180,190, and 200. The first to fourth plasma electrodes 551, 552, 553, and554 are respectively connected with first to fourth matching members561, 562, 563, and 564, and the first to fourth matching members 561,562, 563, and 564 are all connected to a plasma processor 651. Also, theplasma processor 651 is connected to a plasma power source 751. In themulti-wafer deposition apparatus according to the present exemplaryembodiment, the plasma processor 651 connected to the plasma powersource 751 receives power from the plasma power source 751, and appliesit to the first to fourth matching members 561, 562, 563, and 564 with apredetermined magnitude during a predetermined time such that apredetermined voltage is applied to the first to fourth plasmaelectrodes 551, 552, 553, and 554.

Also, the first inlet 172 and the second inlet 182, and the third inlet192 and the fourth inlet 202, of the multi-wafer deposition apparatusaccording to the present exemplary embodiment are respectively connectedto one of external pipes 470 and 480 at intersecting points, and theintersecting points may include switches 370 and 380. Through theswitches 370 and 380, one of the first inlet 172 and the second inlet182 may be connected to the external pipe 470, and one of the thirdinlet 192 and the fourth inlet 202 may be connected to the external pipe480.

Referring to FIG. 12, the plasma processor 651 of the multi-waferdeposition apparatus according to the present exemplary embodimentincludes a first switch 645 c that switches by connecting one powerapplication unit c and two power output units d and d′ to each other, asecond switch 645 d that switches by connecting the first power outputunit d and two third output units e and e′ to each other, a third switch645 e that switches by connecting the second power output unit d′ andtwo fourth output units f and f′, and a splitter driving circuit 644 cconnected to the third output units e and e′ and the fourth output unitsf and f′ and controlling the first to third switches 645 c, 645 d, and645 e depending on the magnitude of the output voltage and an externalsignal. The splitter driving circuit 644 c of the plasma processor 651of the multi-wafer deposition apparatus according to the presentexemplary embodiment is connected to the third output units e and e′ andthe fourth output units f and f′ thereby measuring the operation of thefirst to third switches 645 c, 645 d, and 645 e by measuring the plasmapower output to the third output units e and e′ and the fourth outputunits f and f′ such that correct switching is confirmed, and thesplitter driving circuit 644 c controls the operation of the first tothird switches 645 c, 645 d, and 645 e depending on the external signalsuch that the input plasma power is output to the third output units eand e′ and the fourth output units f and f′.

The third output units e and e′ and the fourth output units f and f′ arerespectively connected to the first to fourth matching members 561, 562,563, and 564 connected to the first to fourth plasma electrodes 551,552, 553, and 554 shown in FIG. 11. Accordingly, the power applied fromthe plasma power source 751 is applied to the first to fourth matchingmembers 561, 562, 563, and 564 with the predetermined magnitude duringthe predetermined time according to the operation of the first to thirdswitches 645 c, 645 d, and 645 e of the plasma splitter of the plasmaprocessor 651 such that the predetermined voltage is applied to thefirst to fourth plasma electrodes 551, 552, 553, and 554.

The operation of the plasma processor 651 of the multi-wafer depositionapparatus according to the present exemplary embodiment will bedescribed with reference to FIG. 12 and FIG. 13. In FIG. 13, the on/offoperation of the first to third switches 645 c, 645 d, and 645 e of theplasma splitter are respectively represented as SP1, SP2 and SP3, andthe on/off operation of the voltage applied to the first to fourthplasma electrodes 551, 552, 553, and 554 are respectively represented asRC1, RC2, RC3, and RC4.

Referring to FIG. 12 and FIG. 13, if the first switch 645 c and thesecond switch 645 d of the plasma splitter are in the on state and thethird switch 645 e is in the off state, the power application unit c isconnected to the power output unit e of the second power output units eand e′ through the first power output unit d such that the plasmavoltage is applied to the first plasma electrode 551.

Also, if the first switch 645 c of the plasma splitter is in the onstate and the second switch 645 d and the third switch 645 e are in theoff state, the power application unit c is connected to the power outputunit e′ of the second power output units e and e′ through the firstpower output unit d such that the plasma voltage is applied to thesecond plasma electrode 552.

Further, if the first switch 645 c and the second switch 645 d of theplasma splitter are in the off state and the third switch 645 e is inthe on state, the power application unit c is connected to the poweroutput unit f of the second power output units f and f′ through thesecond power output unit d′ such that the plasma voltage is applied tothe third plasma electrode 553.

Also, if the first switch 645 c to the third switch 645 e of the plasmasplitter are in the off state, the power application unit c is connectedto the power output unit f′ of the second power output units f and f′through the second power output unit d′ such that the plasma voltage isapplied to the fourth plasma electrode 554.

In this way, the plasma processor 651 of the multi-wafer depositionapparatus according to the present exemplary embodiment controls theon/off operation of the first to the third switches 645 c, 645 d, and645 e of the plasma splitter such that the plasma voltage may besequentially applied to the predetermined reaction spaces 170, 180, 190,and 200 during the predetermined time period.

A plasma processor and an operation thereof of a multi-wafer depositionapparatus according to the fifth exemplary embodiment of the presentinvention will be described with reference to FIG. 14 to FIG. 16. FIG.14 is a layout view of a multi-wafer deposition apparatus according tofifth exemplary embodiment of the present invention, FIG. 15 is aschematic view of a plasma processor in a multi-wafer depositionapparatus according to fifth exemplary embodiment of the presentinvention, and FIG. 16 is a waveform diagram illustrating an operationof a multi-wafer deposition apparatus according to fifth exemplaryembodiment of the present invention.

Referring to FIG. 14, the multi-wafer deposition apparatus according tothe present exemplary embodiment includes a plurality of reaction spaces170, 180, 190, and 200, and first to fourth plasma electrodes 571, 572,573, and 574 respectively inserted into the reaction spaces 170, 180,190, and 200. The first and second plasma electrodes 571 and 572 arecommonly connected to a first matching member 581, and the third andfourth plasma electrodes 573 and 574 are commonly connected to a secondmatching member 582.

The first and second matching members 581 and 582 are connected to aplasma processor 652 through first and second connections 900 a and 900b. Also, the plasma processor 652 is connected to the plasma powersource 751. In the multi-wafer deposition apparatus according to thepresent exemplary embodiment, the plasma processor 652 connected to theplasma power source 751 receives the power from the plasma power source751, and applies it to the first and second matching members 581 and 582through the first and second connections 900 a and 900 b with apredetermined magnitude during a predetermined time such that apredetermined voltage is applied to the first to fourth plasmaelectrodes 571, 572, 573, and 574.

Also, the first inlet 172 and the second inlet 182, and the third inlet192 and the fourth inlet 202, of the multi-wafer deposition apparatusaccording to the present exemplary embodiment are respectively connectedto one of external pipes 471 and 481 at intersecting points, and theintersecting points may include switches 371 and 381. Through theswitches 371 and 381, one of the first inlet 172 and the second inlet182 may be connected to the external pipes 471, and one of the thirdinlet 192 and the fourth inlet 202 may be connected to the external pipe481.

Referring to FIG. 15, the plasma processor 652 includes a plasmasplitter. In detail, the plasma processor 652 includes a driving circuit644 d controlling a switch 645 f, and the switch 645 f connects andswitches the power application unit g and two power output units h andh′ connected to the plasma power source 751. The driving circuit 644 dthat is connected to the power output units h and h′ measures theoperation of the switch 645 f by measuring the plasma power output tothe power output units h and h′ and thereby the correct switching isconfirmed, and the driving circuit 644 d controls the operation of theplasma processor 652 depending on an external signal (a splitter signalinterface) such that the input plasma power is outputted to therespective output units h and h′.

If the driving circuit 644 d controls the switch 645 f depending on theexternal signal such that the switch is in the on state, the powerapplication unit g is connected to the output unit h of the power outputunits h and h′ such that the output unit h is applied with the plasmapower, and this power is transmitted to the first connection 900 aconnected to the output unit h. Also, if the driving circuit 644 dcontrols the switch 645 f depending on the external signal such that theswitch is in the off state, the power application unit g is connected tothe output unit h′ of the power output units h and h′ such that theoutput unit h′ is applied with the plasma power, and this power istransmitted to the second connection 900 b connected to the output unith′. In this way, the plasma processor 652 of the multi-wafer depositionapparatus according to the present exemplary embodiment includes theplasma splitter such that the plasma power may be applied to the desiredoutput units h and h′ depending on the external signal.

The operation of the plasma processor 651 of the multi-wafer depositionapparatus according to the exemplary embodiment will be described withreference to FIG. 16. In FIG. 16, the on/off operation of the plasmasplitter is represented as SP, and the on/off operation of the voltageapplied to the first to fourth plasma electrodes 571, 572, 573, and 574are represented as RC1, RC2, RC3, RC4.

Referring to FIG. 16, if the switch 645 f of the plasma processor 651 isin the on state, the power application unit g connected to the plasmapower source 751 is connected to the output unit h of the power outputunits h and h′, and the power output to the output unit h is transmittedto the first matching member 581 through the first connection 900 a suchthat the plasma voltage is applied to the first and second plasmaelectrodes 571 and 572. Also, if the switch 645 f of the plasma splitteris in the off state, the power application unit g connected to theplasma power source 751 is connected to the output unit h′ of the poweroutput units h and h′ and the power output to the output unit h′ istransmitted to the second matching member 582 through the secondconnection 900 b such that the plasma voltage is applied to the thirdand fourth plasma electrodes 573 and 574.

In this way, the plasma processor 651 of the multi-wafer depositionapparatus according to the present exemplary embodiment includes theplasma splitter such that the plasma voltage may be applied to theplurality of reaction spaces during the predetermined time periodthrough the control of this operation.

A multi-wafer deposition apparatus according to another exemplaryembodiment of the present invention will be described with reference toFIG. 17. FIG. 17 is a schematic view of a multi-wafer depositionapparatus according to another exemplary embodiment of the presentinvention.

Referring to FIG. 17, a multi-wafer deposition apparatus according tothe present exemplary embodiment includes a plurality of plasmaelectrodes C1 to Cn and matching members MN1 to MNn respectivelyconnected to the plasma electrodes C1 to Cn, wherein all matchingmembers MN1 to MNn are connected to one plasma splitter 600 c and theplasma splitter 600 c is connected to a plasma power source 700 a.Although not shown, the plasma splitter 600 c may include a plurality ofswitches and driving circuits, and by controlling the on/off operationof the switches, the predetermined plasma electrodes of the plasmaelectrodes C1 to Cn may be connected to the input portion of the plasmapower source 700 a such that the predetermined plasma electrodes C1 toCn may be applied with a plasma voltage to generate the plasma in arespective reaction space.

A multi-wafer deposition apparatus according to another exemplaryembodiment of the present invention will be described with reference toFIG. 18. FIG. 18 is a schematic view of a multi-wafer depositionapparatus according to another exemplary embodiment of the presentinvention.

Referring to FIG. 18, a multi-wafer deposition apparatus according tothe present exemplary embodiment includes a plurality of plasmaelectrodes C1 to Cn, and a plasma distributing unit 800 a respectivelyconnected to each of the plasma electrodes C1 to Cn. The plasmadistributing unit 800 a is connected to matching member 500 b, and thematching member 500 b is connected to plasma power source 700 b.

Although not shown, the plasma distributing unit 800 a includes aplurality of distributors such that the plasma power input from theinput portion of the plasma power source 700 b is equally distributed tothe plasma electrodes C1 to Cn, and accordingly the uniform plasmavoltage is applied to the plasma electrodes C1 to Cn such that uniformplasma may be generated to the plurality of reaction spaces.

The deposition apparatus and plasma processor according to theabove-described exemplary embodiment of the present invention may bevariously changed and have improved shapes based on the idea of thepresent invention. For example, four reaction spaces 170, 180, 190, and200 are shown in FIG. 1, FIG. 2, FIG. 5, FIG. 8, FIG. 11, and FIG. 14,however the deposition apparatus according to an exemplary embodiment ofthe present invention may include another number of reaction spaces, andthe number plasma splitters and plasma distributors may be determined byconsidering the number of reaction spaces and the plasma power sourceused. In addition, the type and structure of multi-wafer depositionsystem may be varied or modified from those of this invention within theequivalent and same concept.

Also, the deposition apparatus according to the above-describedexemplary embodiment of the present invention may include a controlsystem or a controller (not shown). The control system (controller)controls a controlling circuit controlling the operation of the plasmasplitter and the plasma distributor as well as various wafer processsteps such as the kind and period of gas input to the reaction space,the pressure inside the reaction space, the pump, the substratetemperature, and in-situ and/or remote plasma generation. The controlsystem (controller) may include at least one of computers that arecapable of communicating with each other, and various processing unitsprocessing the deposition apparatus to realize the deposition methodaccording to an exemplary embodiment of the present invention.

In a portion of the above described exemplary embodiments, the optionalconstituent elements may be substituted for those that can realize theappropriate function.

While this invention has been described in connection with what ispresently considered to be practical exemplary embodiments, it is to beunderstood that the invention is not limited to the disclosedembodiments, but, on the contrary, is intended to cover variousmodifications and equivalent arrangements included within the spirit andscope of the appended claims.

What is claimed is:
 1. A deposition method performed by using a deposition apparatus comprising: a first reaction space having a first plasma electrode and connected to a first gas inlet; a second reaction space having a second plasma electrode and connected to a second gas inlet; a third reaction space having a third plasma electrode and connected to a third gas inlet; a fourth reaction space having a fourth plasma electrode and connected to a fourth gas inlet; a first matching member connected to the first plasma electrode; a second matching member connected to the second plasma electrode; a third matching member connected to the third plasma electrode; a fourth matching member connected to the fourth plasma electrode; a first plasma processor connected to the first matching member and the second matching member; a second plasma processor connected to the third matching member and the fourth matching member; a first plasma power source connected to the first plasma processor; and a second plasma power source connected to the second plasma processor, wherein the first reaction space, the second reaction space, the third reaction space, and the fourth reaction space are sequentially arranged in a chamber, wherein the deposition method comprises: applying a first plasma power to the first plasma electrode and the second plasma electrode without applying any power to the third plasma electrode and the fourth plasma electrode for a first period; applying a second plasma power to the third plasma electrode and the fourth plasma electrode without applying any power to the first plasma electrode and the second plasma electrode for a second period, and wherein the first period and the second period alternate, and wherein the plasma processor further comprises: a first sensor connected to the first distributor; a second sensor connected to the second distributor; a third sensor connected to the third distributor; a fourth sensor connected to the fourth distributor; a control board configured to control the splitter driving circuit, the first distributor driving circuit, and the second distributor driving circuit, and wherein the deposition method further comprises: detecting plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor; and controlling a magnitude of the plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor to be a predetermined value.
 2. The deposition method of claim 1, wherein the first reaction space and the second reaction space face each other in a first direction, the third reaction space and the fourth reaction space face each other in the first direction, the first reaction space and the fourth reaction space face each other in a second direction perpendicular to the first direction, and the second reaction space and the third reaction space face each other in the second direction.
 3. The deposition method of claim 1, wherein the first plasma processor comprises a first distributor and a second distributor, and the second plasma processor comprises a third distributor and a fourth distributor, and wherein the first plasma electrode is supplied with the first plasma power via the first distributor, the second plasma electrode is supplied with the first plasma power via the second distributor, the third plasma electrode is supplied with the second plasma power via the third distributor, and the fourth plasma electrode is supplied with the second plasma power via the fourth distributor.
 4. The deposition method of claim 3, wherein the first plasma processor further comprises a first sensor connected between the first distributor and the first plasma electrode and a second sensor connected between the second distributor and the second plasma electrode, and the second plasma processor further comprises a third sensor connected between the third distributor and the third plasma electrode and a fourth sensor connected between the fourth distributor and the fourth plasma electrode, wherein the deposition method further comprises: detecting plasma power output from the first distributor and the second distributor with the first sensor and the second sensor respectively; and detecting plasma power output from the third distributor and the fourth distributor with the third sensor and the fourth sensor respectively.
 5. The deposition method of claim 4, further comprising: driving the first distributor and the second distributor in accordance with an external signal and a magnitude of the plasma power detected by the first sensor and the second sensor; and driving the third distributor and the fourth distributor in accordance with with an external signal and a magnitude of the plasma power detected by the third sensor and the fourth sensor.
 6. A deposition method performed by using a deposition apparatus comprising: a first reaction space having a first plasma electrode and connected to a first gas inlet; a second reaction space having a second plasma electrode and connected to a second gas inlet; a third reaction space having a third plasma electrode and connected to a third gas inlet; a fourth reaction space having a fourth plasma electrode and connected to a fourth gas inlet; a first matching member connected to the first plasma electrode; a second matching member connected to the second plasma electrode; a third matching member connected to the third plasma electrode; a fourth matching member connected to the fourth plasma electrode; a first plasma processor connected to the first matching member and the second matching member; a second plasma processor connected to the third matching member and the fourth matching member; a first plasma power source connected to the first plasma processor; and a second plasma power source connected to the second plasma processor, wherein the first reaction space, the second reaction space, the third reaction space, and the fourth reaction space are sequentially arranged in a chamber, wherein the deposition method comprises: applying a first plasma power to the first plasma electrode and the second plasma electrode and a second plasma power to the third plasma electrode and the fourth plasma electrode for a first period; maintaining the first plasma electrode, the second plasma electrode, the third plasma electrode, and the fourth plasma electrode for a second period without applying any power, and wherein the first period and the second period alternate, and wherein the plasma processor further comprises: a first sensor connected to the first distributor; a second sensor connected to the second distributor; a third sensor connected to the third distributor; a fourth sensor connected to the fourth distributor; a control board configured to control the splitter driving circuit, the first distributor driving circuit, and the second distributor driving circuit, and wherein the deposition method further comprises: detecting plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor; and controlling a magnitude of the plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor to be a predetermined value.
 7. The deposition method of claim 6, wherein the first reaction space and the second reaction space face each other in a first direction, the third reaction space and the fourth reaction space face each other in the first direction, the first reaction space and the fourth reaction space face each other in a second direction perpendicular to the first direction, and the second reaction space and the third reaction space face each other in the second direction.
 8. The deposition method of claim 6, wherein the first plasma processor comprises a first distributor and a second distributor, and the second plasma processor comprises a third distributor and a fourth distributor, and wherein the first plasma electrode is supplied with the first plasma power via the first distributor, the second plasma electrode is supplied with the first plasma power via the second distributor, the third plasma electrode is supplied with the second plasma power via the third distributor, and the fourth plasma electrode is supplied with the second plasma power via the fourth distributor.
 9. The deposition method of claim 8, wherein the first plasma processor further comprises a first sensor connected between the first distributor and the first plasma electrode and a second sensor connected between the second distributor and the second plasma electrode, and the second plasma processor further comprises a third sensor connected between the third distributor and the third plasma electrode and a fourth sensor connected between the fourth distributor and the fourth plasma electrode, wherein the deposition method further comprises: detecting plasma power output from the first distributor and the second distributor with the first sensor and the second sensor respectively; and detecting plasma power output from the third distributor and the fourth distributor with the third sensor and the fourth sensor respectively.
 10. The deposition method of claim 9, further comprising: driving the first distributor and the second distributor in accordance with an external signal and a magnitude of the plasma power detected by the first sensor and the second sensor; and driving the third distributor and the fourth distributor in accordance with with an external signal and a magnitude of the plasma power detected by the third sensor and the fourth sensor.
 11. A deposition method performed by using a deposition apparatus comprising: a first reaction space having a first plasma electrode and connected to a first gas inlet; a second reaction space having a second plasma electrode and connected to a second gas inlet; a third reaction space having a third plasma electrode and connected to a third gas inlet; a fourth reaction space having a fourth plasma electrode and connected to a fourth gas inlet; a first matching member connected to the first plasma electrode; a second matching member connected to the second plasma electrode; a third matching member connected to the third plasma electrode; a fourth matching member connected to the fourth plasma electrode; a first plasma processor connected to the first matching member and the second matching member; a second plasma processor connected to the third matching member and the fourth matching member; a first plasma power source connected to the first plasma processor; and a second plasma power source connected to the second plasma processor, wherein the first reaction space, the second reaction space, the third reaction space, and the fourth reaction space are sequentially arranged in a chamber, wherein the deposition method comprises: applying a first plasma power to one of the first plasma electrode and the second plasma electrode and applying a second plasma power to one of the third plasma electrode and the fourth plasma electrode for a first period; applying the first plasma power to the other one of the first plasma electrode and the second plasma electrode and applying the second plasma power to the other one of the third plasma electrode and the fourth plasma electrode for a second period, and wherein the first period and the second period alternate, and wherein the plasma processor further comprises: a first sensor connected to the first distributor; a second sensor connected to the second distributor; a third sensor connected to the third distributor; a fourth sensor connected to the fourth distributor; a control board configured to control the splitter driving circuit, the first distributor driving circuit, and the second distributor driving circuit, and wherein the deposition method further comprises: detecting plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor; and controlling a magnitude of the plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor to be a predetermined value.
 12. The deposition method of claim 11, wherein the first plasma processor comprises a first splitter, the second plasma processor comprises a second splitter, the first splitter comprises a first power input terminal, a first power output terminal, a second power output terminal, a first switch configured to alternately connect the first power input terminal to the first power output terminal or the second power output terminal, and a first driving circuit configured to control the first switch, the second splitter comprises a second power input terminal, a third power output terminal, a fourth power output terminal, a second switch configured to alternately connect the second power input terminal to the third power output terminal or the fourth power output terminal, and a second driving circuit configured to control the second switch, the first power output terminal is connected to the first matching member, the second power output terminal is connected to the second matching member, the third power output terminal is connected to the third matching member, the fourth power output terminal is connected to the fourth matching member, the first plasma power is supplied to the first matching member via the first power output terminal or the second matching member via the second power output terminal, and the second plasma power is supplied to the third matching member via the third power output terminal or the fourth matching member via the fourth power output terminal.
 13. A deposition method performed by using a deposition apparatus comprising: a first reaction space having a first plasma electrode and connected to a first gas inlet; a second reaction space having a second plasma electrode and connected to a second gas inlet; a third reaction space having a third plasma electrode and connected to a third gas inlet; a fourth reaction space having a fourth plasma electrode and connected to a fourth gas inlet; a first matching member connected to the first plasma electrode; a second matching member connected to the second plasma electrode; a third matching member connected to the third plasma electrode; a fourth matching member connected to the fourth plasma electrode; a first plasma processor connected to the first matching member and the second matching member; a second plasma processor connected to the third matching member and the fourth matching member; a first plasma power source connected to the first plasma processor; and a second plasma power source connected to the second plasma processor, wherein the first reaction space, the second reaction space, the third reaction space, and the fourth reaction space are sequentially arranged in a chamber, wherein the deposition method comprises: applying a first plasma power to the first plasma electrode via the first plasma processor without applying any power to the second plasma electrode, the third plasma electrode, and the fourth plasma electrode for a first period; applying a first plasma power to the second plasma electrode via the first plasma processor without applying any power to the first plasma electrode, the third plasma electrode, and the fourth plasma electrode for a second period; applying a second plasma power to the third plasma electrode via the second plasma processor without applying any power to the first plasma electrode, the second plasma electrode, and the fourth plasma electrode for a third period; and applying a second plasma power to the fourth plasma electrode via the second plasma processor without applying any power to the first plasma electrode, the second plasma electrode, and the third plasma electrode for a fourth period, wherein the first period, the second period, the third period, and the fourth period are sequential, and wherein the plasma processor further comprises: a first sensor connected to the first distributor; a second sensor connected to the second distributor; a third sensor connected to the third distributor; a fourth sensor connected to the fourth distributor; a control board configured to control the splitter driving circuit, the first distributor driving circuit, and the second distributor driving circuit, and wherein the deposition method further comprises: detecting plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor; and controlling a magnitude of the plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor to be a predetermined value.
 14. The deposition method of claim 13, wherein the first plasma processor comprises a first splitter, the second plasma processor comprises a second splitter, the first splitter comprises a first power input terminal, a first power output terminal, a second power output terminal, a first switch configured to alternately connect the first power input terminal to the first power output terminal or the second power output terminal, and a first driving circuit configured to control the first switch, the second splitter comprises a second power input terminal, a third power output terminal, a fourth power output terminal, a second switch configured to alternately connect the second power input terminal to the third power output terminal or the fourth power output terminal, and a second driving circuit configured to control the second switch, the first power output terminal is connected to the first matching member, the second power output terminal is connected to the second matching member, the third power output terminal is connected to the third matching member, the fourth power output terminal is connected to the fourth matching member, the first plasma power is supplied to the first matching member via the first power output terminal or the second matching member via the second power output terminal, and the second plasma power is supplied to the third matching member via the third power output terminal or the fourth matching member via the fourth power output terminal.
 15. A deposition method performed by using a deposition apparatus comprising: a first reaction space having a first plasma electrode and connected to a first gas inlet; a second reaction space having a second plasma electrode and connected to a second gas inlet; a third reaction space having a third plasma electrode and connected to a third gas inlet; a fourth reaction space having a fourth plasma electrode and connected to a fourth gas inlet; a first matching member connected to the first plasma electrode; a second matching member connected to the second plasma electrode; a third matching member connected to the third plasma electrode; a fourth matching member connected to the fourth plasma electrode; a plasma processor connected to the first matching member, the second matching member, the third matching member, and the fourth matching member; and a plasma power source connected to the plasma processor, wherein the first reaction space, the second reaction space, the third reaction space, and the fourth reaction space are sequentially arranged in a chamber, wherein the deposition method comprises: applying a plasma power to the first plasma electrode and the second plasma electrode without applying any power to the third plasma electrode and the fourth plasma electrode for a first period; applying the plasma power to the third plasma electrode and the fourth plasma electrode without applying any power to the first plasma electrode and the second plasma electrode for a second period, and wherein the first period and the second period alternate, and wherein the plasma processor further comprises: a first sensor connected to the first distributor; a second sensor connected to the second distributor; a third sensor connected to the third distributor; a fourth sensor connected to the fourth distributor; a control board configured to control the splitter driving circuit, the first distributor driving circuit, and the second distributor driving circuit, and wherein the deposition method further comprises: detecting plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor; and controlling a magnitude of the plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor to be a predetermined value.
 16. The deposition method of claim 15, wherein the first reaction space and the second reaction space face each other in a first direction, the third reaction space and the fourth reaction space face each other in the first direction, the first reaction space and the fourth reaction space face each other in a second direction perpendicular to the first direction, and the second reaction space and the third reaction space face each other in the second direction.
 17. The deposition method of claim 15, wherein the plasma processor comprises: a splitter comprising a power input terminal, a first power output terminal, a second power output terminal, and a switch configured to alternately connect the power input terminal to the first power output terminal or the second power output terminal; a splitter driving circuit configured to control operation of the splitter; a first distributor connected to the first power output terminal, a second distributor connected to the first power output terminal, and a first distributor driving circuit connected to the first distributor and the second distributor; and a third distributor connected to the second power output terminal, a fourth distributor connected to the second power output terminal, and a second distributor driving circuit connected to the third distributor and the fourth distributor, and wherein the deposition method further comprises: detecting plasma power output from the first power output terminal and the second power output terminal; and controlling a magnitude of the plasma power output from the first power output terminal and the second power output terminal to be a predetermined value.
 18. A deposition method performed by using a deposition apparatus comprising: a first reaction space having a first plasma electrode and connected to a first gas inlet; a second reaction space having a second plasma electrode and connected to a second gas inlet; a third reaction space having a third plasma electrode and connected to a third gas inlet; a fourth reaction space having a fourth plasma electrode and connected to a fourth gas inlet; a first matching member connected to the first plasma electrode; a second matching member connected to the second plasma electrode; a third matching member connected to the third plasma electrode; a fourth matching member connected to the fourth plasma electrode; a plasma processor connected to the first matching member, the second matching member, the third matching member, and the fourth matching member; and a plasma power source connected to the plasma processor, wherein the first reaction space, the second reaction space, the third reaction space, and the fourth reaction space are sequentially arranged in a chamber, wherein the deposition method comprises: applying a first plasma power to the first plasma electrode without applying any power to the second plasma electrode, the third plasma electrode, and the fourth plasma electrode for a first period; applying a first plasma power to the second plasma electrode without applying any power to the first plasma electrode, the third plasma electrode, and the fourth plasma electrode for a second period; applying a second plasma power to the third plasma electrode without applying any power to the first plasma electrode, the second plasma electrode, and the fourth plasma electrode for a third period; and applying a second plasma power to the fourth plasma electrode without applying any power to the first plasma electrode, the second plasma electrode, and the third plasma electrode for a fourth period, wherein the first period, the second period, the third period, and the fourth period are sequential, and wherein the plasma processor further comprises: a first sensor connected to the first distributor; a second sensor connected to the second distributor; a third sensor connected to the third distributor; a fourth sensor connected to the fourth distributor; a control board configured to control the splitter driving circuit, the first distributor driving circuit, and the second distributor driving circuit, and wherein the deposition method further comprises: detecting plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor; and controlling a magnitude of the plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor to be a predetermined value.
 19. The deposition method of claim 18, wherein the plasma processor comprises: a first switch configured to connect a power input terminal to a first power output terminal or a second power output terminal; a second switch configured to connect the first power output terminal to a third output terminal or a fourth output terminal; a third switch configured to connect the second power output terminal to a fifth output terminal or a sixth output terminal; a splitter driving circuit configured to control the first switch, the second switch, and the third switch in accordance with an external signal and a magnitude of plasma power output from the third output terminal, the fourth output terminal, the fifth output terminal, and the sixth output terminal, and wherein the deposition method further comprises: detecting the plasma power output from the third output terminal, the fourth output terminal, the fifth output terminal, and the sixth output terminal with the splitter driving circuit; and controlling the first switch, the second switch, and the third switch to output the plasma power to the third output terminal, the fourth output terminal, the fifth output terminal, and the sixth output terminal with a predetermined value.
 20. A deposition method performed by using a deposition apparatus comprising: a first reaction space having a first plasma electrode and connected to a first gas inlet; a second reaction space having a second plasma electrode and connected to a second gas inlet; a third reaction space having a third plasma electrode and connected to a third gas inlet; a fourth reaction space having a fourth plasma electrode and connected to a fourth gas inlet; a first matching member connected to the first plasma electrode and the second plasma electrode; a second matching member connected to the third plasma electrode and the fourth plasma electrode; a plasma processor connected to the first matching member and the second matching member; and a plasma power source connected to the plasma processor, wherein the first reaction space, the second reaction space, the third reaction space, and the fourth reaction space are sequentially arranged in a chamber, wherein the deposition method comprises: applying a plasma power to the first plasma electrode and the second plasma electrode without applying any power to the third plasma electrode and the fourth plasma electrode for a first period; applying the plasma power to the third plasma electrode and the fourth plasma electrode without applying any power to the first plasma electrode and the second plasma electrode for a second period, and wherein the first period and the second period alternate, and wherein the plasma processor further comprises: a first sensor connected to the first distributor; a second sensor connected to the second distributor; a third sensor connected to the third distributor; a fourth sensor connected to the fourth distributor; a control board configured to control the splitter driving circuit, the first distributor driving circuit, and the second distributor driving circuit, and wherein the deposition method further comprises: detecting plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor; and controlling a magnitude of the plasma power supplied to the first distributor, the second distributor, the third distributor, and the fourth distributor to be a predetermined value.
 21. The deposition method of claim 20, wherein the plasma processor comprises: a power input terminal connected to the plasma power source; a first power output terminal; a second power output terminal; a switch configured to alternately connect the power input terminal to the first power output terminal or the second power output terminal; and a driving circuit configured to control operation of the switch, the first power output terminal is connected to the first matching member, the second power output terminal is connected to the second matching member, the driving circuit is configured to detect power output from the first power output terminal and the second power output terminal and control the switch to connect the power input terminal to the first power output terminal or the second power output terminal. 